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Variability of metal/h-BN/metal memristors grown via chemical vapor deposition on different materials
- Source :
- Microelectronics Reliability. 102:113410
- Publication Year :
- 2019
- Publisher :
- Elsevier BV, 2019.
-
Abstract
- Chemical vapor deposition (CVD) is one of the most common techniques to grow large-area hexagonal boron nitride (h-BN). However, the substrate on which the h-BN is grown plays an important role in the electrical properties of this insulating material. The high temperature used during the CVD process produces the polycrystallization of the metallic substrates, which may modify the electrical properties of the h-BN/metal from one grain to another. In this work, we compare the electrical properties of CVD-grown multilayer h-BN on three different metallic substrates: Pt, Cu and Fe. This study reveals that the properties of h-BN based devices variate remarkably from one grain to another. On the contrary, this behavior is not relevant for when using Cu and Fe. On the other hand, we have also studied the resistive switching behavior in Au/Ti/h-BN/Pt, Au/Ti/h-BN/Cu, and Au/Ag/h-BN/Fe devices, and demonstrated low variability when they are grown on the same metallic grain.
- Subjects :
- 010302 applied physics
Materials science
020208 electrical & electronic engineering
Hexagonal boron nitride
02 engineering and technology
Substrate (electronics)
Chemical vapor deposition
Memristor
Condensed Matter Physics
01 natural sciences
Atomic and Molecular Physics, and Optics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
law.invention
Metal
Chemical engineering
law
visual_art
Resistive switching
0103 physical sciences
0202 electrical engineering, electronic engineering, information engineering
visual_art.visual_art_medium
Electrical and Electronic Engineering
Safety, Risk, Reliability and Quality
Subjects
Details
- ISSN :
- 00262714
- Volume :
- 102
- Database :
- OpenAIRE
- Journal :
- Microelectronics Reliability
- Accession number :
- edsair.doi...........4c407400469bcf24975736bc4a6e3bad
- Full Text :
- https://doi.org/10.1016/j.microrel.2019.113410