Influence of the argon ratio on the structure and properties of thin films prepared using PECVD in TMSAc/Ar mixtures

Authors :: Štěpánka Kelarová
Roman Přibyl
Vojtěch Homola
Josef Polčák
Anna Charvátová Campbell
Marek Havlíček
Kateřina Vrchovecká
Richard Václavik
Lukáš Zábranský
Vilma Buršíková
Source :: Vacuum. 207:111634
Publication Year :: 2023
Publisher :: Elsevier BV, 2023.

Subjects :: Condensed Matter Physics
Instrumentation
Surfaces, Coatings and Films

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