Studies of excimer laser annealing of in situ deposited thin films of YBa2Cu3O7−δ

Superconducting films of YBa 2 Cu 3 O 7−δ have been prepared on yttrium stabilized cubic zirconia in situ by laser (308 nm) ablation. Films have been deposited at 650°C with and without the presence of a second (annealing) excimer radiation pulse (308 nm) incident on the substrate. These films are compared to high-quality films prepared at 790 ° C. In annealing experiments, time delays between the synchronized excimer lasers were varied from 0 to 1000 μs to explore the effect of the annealing radiation throughout the mass arrival time range at the substrate. Little improvement was observed in the overall quality of the deposited films at any time delay. Model calculations indicate that a possible reason for the lack of improvement originates in a temporal width mismatch of the temperature increase of the substrate surface and the mass arrival of the ablated material.