Threshold voltage tuning of IGZTO thin-film transistors deposited by RF sputtering for high-resolution flexible displays using deep ultraviolet light

Authors :: In Pyo Park
Bu Kyeong Hwang
Bo Ram Lee
Pung Keun Song
Soo Won Heo
Source :: Journal of Materials Chemistry C.
Publication Year :: 2023
Publisher :: Royal Society of Chemistry (RSC), 2023.
Abstract: Development of DUV/Thermal dual treatment (DTT) process to improve the electrical performance and stability of oxide thin film transistors while efficiently controlling the threshold voltage of the device.

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