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Delamination initiation criterion of Si/Cu micro-components

Authors :
Ken-ichi Saitoh
Yusuke Morii
Masanori Takuma
Yoshimasa Takahashi
Tomohiro Sato
Source :
The Proceedings of Mechanical Engineering Congress, Japan. 2020:J22306
Publication Year :
2020
Publisher :
Japan Society of Mechanical Engineers, 2020.

Subjects

Subjects :
Micro components
Free edge
Materials science
chemistry
Silicon
Interface (computing)
Delamination
chemistry.chemical_element
Composite material
Edge (geometry)
Copper

Details

ISSN :
24242667
Volume :
2020
Database :
OpenAIRE
Journal :
The Proceedings of Mechanical Engineering Congress, Japan
Accession number :
edsair.doi...........4973f0160e9401f376ebbd657af53d3d

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