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First results of microspectroscopy from a scanning photoemission microscope with a submicron probe size
- Source :
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 11:2324-2329
- Publication Year :
- 1993
- Publisher :
- American Vacuum Society, 1993.
-
Abstract
- Utilizing a Mo–Si multilayer coated Schwarzschild objective to focus 95 eV photons, we have recently demonstrated better than 0.1 μm resolution as a scanning x‐ray transmission microscope. Operating as a scanning photoemission microscope with submicron resolution, we have demonstrated its chemical mapping capabilities by studying a patterned Al/AlOx test structure. In addition, we have also studied the cleaved GaAs(110) surface and have identified lateral variations in the surface band bending on the scale of 100 meV. In both experiments, core level microspectroscopy was performed at selected points on the sample to elucidate the image contrast mechanisms.
- Subjects :
- Chemical imaging
Scanning Hall probe microscope
Microscope
business.industry
Scanning electron microscope
Chemistry
Resolution (electron density)
Synchrotron radiation
Surfaces and Interfaces
Condensed Matter Physics
Surfaces, Coatings and Films
law.invention
Optics
law
Microscopy
Electron microscope
business
Subjects
Details
- ISSN :
- 15208559 and 07342101
- Volume :
- 11
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- Accession number :
- edsair.doi...........486d4feb095ba7b970c75ff962d9bde6