Ex-situ AlN seed layer for (0001)-textured Al0.84Sc0.16N thin films grown on SiO2 substrates

MLA

Stefan Mertin, et al. “Ex-Situ AlN Seed Layer for (0001)-Textured Al0.84Sc0.16N Thin Films Grown on SiO2 Substrates.” 2017 IEEE International Ultrasonics Symposium (IUS), Sept. 2017. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........484df020296f9b6ea3c0ab9ea0855c61&authtype=sso&custid=ns315887.

APA

Stefan Mertin, Pascal Nicolay, Cosmin S. Sandu, Vladimir Pashchenko, Nicolas Kurz, Paul Muralt, & Fazel Parsapour. (2017). Ex-situ AlN seed layer for (0001)-textured Al0.84Sc0.16N thin films grown on SiO2 substrates. 2017 IEEE International Ultrasonics Symposium (IUS).

Chicago

Stefan Mertin, Pascal Nicolay, Cosmin S. Sandu, Vladimir Pashchenko, Nicolas Kurz, Paul Muralt, and Fazel Parsapour. 2017. “Ex-Situ AlN Seed Layer for (0001)-Textured Al0.84Sc0.16N Thin Films Grown on SiO2 Substrates.” 2017 IEEE International Ultrasonics Symposium (IUS), September. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........484df020296f9b6ea3c0ab9ea0855c61&authtype=sso&custid=ns315887.