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Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications

Authors :
Nadezhda Kataeva
P. Czepl
Rudolf Heer
Rainer Hainberger
Roman Bruck
F. Pipelka
Anton Köck
K. Kaiblinger
Brian Bilenberg
Source :
Microelectronic Engineering. 87:821-823
Publication Year :
2010
Publisher :
Elsevier BV, 2010.

Abstract

This paper reports the well-controlled replication of nanostructures with features sizes as small as 50nm on the surface of polymethylpentene (PMP) substrates by injection molding. A 2'' silicon wafer carrying the nanostructures served as exchangeable mold insert. This PMP injection molding process is aimed at developing a planar optical polymer waveguide platform for evanescent wave sensing. In particular we focus on disposable polymer optical biochips for the label-free detection of bio-molecules.

Details

ISSN :
01679317
Volume :
87
Database :
OpenAIRE
Journal :
Microelectronic Engineering
Accession number :
edsair.doi...........470a27c4f438d5a1c6c34cb58553a11c
Full Text :
https://doi.org/10.1016/j.mee.2009.11.066