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Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications
- Source :
- Microelectronic Engineering. 87:821-823
- Publication Year :
- 2010
- Publisher :
- Elsevier BV, 2010.
-
Abstract
- This paper reports the well-controlled replication of nanostructures with features sizes as small as 50nm on the surface of polymethylpentene (PMP) substrates by injection molding. A 2'' silicon wafer carrying the nanostructures served as exchangeable mold insert. This PMP injection molding process is aimed at developing a planar optical polymer waveguide platform for evanescent wave sensing. In particular we focus on disposable polymer optical biochips for the label-free detection of bio-molecules.
- Subjects :
- chemistry.chemical_classification
Bioelectronics
Materials science
Silicon
Polymethylpentene
chemistry.chemical_element
Nanotechnology
Molding (process)
Polymer
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
chemistry.chemical_compound
chemistry
Wafer
Electrical and Electronic Engineering
Biochip
Biosensor
Subjects
Details
- ISSN :
- 01679317
- Volume :
- 87
- Database :
- OpenAIRE
- Journal :
- Microelectronic Engineering
- Accession number :
- edsair.doi...........470a27c4f438d5a1c6c34cb58553a11c
- Full Text :
- https://doi.org/10.1016/j.mee.2009.11.066