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3D Nanoscale Chiral Helixes Fabricated by Focused Helium Ion Beam Manufacturing Process
- Source :
- 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
- Publication Year :
- 2020
- Publisher :
- IEEE, 2020.
-
Abstract
- As chiral structures, three-dimensional (3D) nanohelixes have the circular dichroism and optical rotation under circularly polarized light. It also has a good application prospect in optical modulators with high modulation efficiency. However, it is still a challenging task to fabricate 3D nanohelixes with high precision, controllable parameters and perfect morphology. In this study, we develop FIB (focused ion beam)-SID (stress induced deformation) by using HIB (helium ion beam) instead of GIB (gallium ion beam) for nanofabrication. This general 3D nanofabrication technique allows much stronger manufacturing control, which lead to a greater programmable and accurate bidirectional folding $(-160^{\circ}-+75^{\circ})$ of various metal and dielectric thin films. Higher manufacturing accuracy of HIB makes it possible to fabricate smaller nanostructures (characteristic size is about 100 nm), which provides strong support for 3D nanostructure fabricated in visible light wave band.
- Subjects :
- Nanostructure
Materials science
Ion beam
business.industry
chemistry.chemical_element
02 engineering and technology
010402 general chemistry
021001 nanoscience & nanotechnology
01 natural sciences
Focused ion beam
0104 chemical sciences
Optical modulator
Nanolithography
chemistry
Optoelectronics
Optical rotation
Gallium
0210 nano-technology
business
Circular polarization
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
- Accession number :
- edsair.doi...........46c436040dad545210fec1dfc06805f6