Understanding and Utilizing Reactive Oxygen Reservoirs in Atomic Layer Deposition of Metal Oxides with Ozone

Authors :: Joel R. Schneider
Camila de Paula
Nathaniel E. Richey
Jon G. Baker
Solomon T. Oyakhire
Stacey F. Bent
Source :: Chemistry of Materials. 34:5584-5597
Publication Year :: 2022
Publisher :: American Chemical Society (ACS), 2022.

Subjects :: General Chemical Engineering
Materials Chemistry
General Chemistry

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