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Demonstration of nanometer recording with a scanning probe microscope
- Source :
- Microelectronic Engineering. 27:105-108
- Publication Year :
- 1995
- Publisher :
- Elsevier BV, 1995.
-
Abstract
- Feasibility of ultrahigh density information data storage has been newly demonstrated by using an atomic force microscope (AFM). Ultrasmall gold dots ranging from 10 to 100 nm in diameter could be successfully recorded on Si substrate in air by adjusting and applied pulsed voltage of AFM probe (SiO"2 birdbeak-type cantilever) coated with gold thin film. It indicates that the technique has a potential to realize a storage density of more than 100 Gb/in^2 and even 1 Tb/in^2.
- Subjects :
- Materials science
Cantilever
Atomic force microscopy
Nanotechnology
Condensed Matter Physics
Information data
Atomic and Molecular Physics, and Optics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Scanning probe microscopy
Si substrate
Nanometre
Electrical and Electronic Engineering
Thin film
Voltage
Subjects
Details
- ISSN :
- 01679317
- Volume :
- 27
- Database :
- OpenAIRE
- Journal :
- Microelectronic Engineering
- Accession number :
- edsair.doi...........46a50d2d0e375214c5dbf61a2d12ac24
- Full Text :
- https://doi.org/10.1016/0167-9317(94)00066-4