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Demonstration of nanometer recording with a scanning probe microscope

Authors :
Atsushi Kikukawa
Sumio Hosaka
Hajime Koyanagi
Ryo Imura
Mitsuhide Miyamoto
Toshimichi Shintani
Source :
Microelectronic Engineering. 27:105-108
Publication Year :
1995
Publisher :
Elsevier BV, 1995.

Abstract

Feasibility of ultrahigh density information data storage has been newly demonstrated by using an atomic force microscope (AFM). Ultrasmall gold dots ranging from 10 to 100 nm in diameter could be successfully recorded on Si substrate in air by adjusting and applied pulsed voltage of AFM probe (SiO"2 birdbeak-type cantilever) coated with gold thin film. It indicates that the technique has a potential to realize a storage density of more than 100 Gb/in^2 and even 1 Tb/in^2.

Details

ISSN :
01679317
Volume :
27
Database :
OpenAIRE
Journal :
Microelectronic Engineering
Accession number :
edsair.doi...........46a50d2d0e375214c5dbf61a2d12ac24
Full Text :
https://doi.org/10.1016/0167-9317(94)00066-4