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Multiple-surface phase-shifting interferometry
- Source :
- SPIE Proceedings.
- Publication Year :
- 2001
- Publisher :
- SPIE, 2001.
-
Abstract
- I show how phase shifting interferometry can be extended to account for multiple interference effects using a Fourier based analysis technique combined with wavelength tuning and a particular four-surface interferometer geometry. The technique is demonstrated by simultaneously measuring both surface profiles, the optical thickness variation and index homogeneity of a parallel plate. In addition, unlike traditional phase shifting techniques, the linear component of the homogeneity can be measured with high precision. It is shown that a significant linear component exists in a commercially supplied flat.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Details
- ISSN :
- 0277786X
- Database :
- OpenAIRE
- Journal :
- SPIE Proceedings
- Accession number :
- edsair.doi...........464545335f47159db897b480d76abcd2