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Influence of focus positions on underwater femtosecond laser dicing of silicon wafer
- Source :
- Journal of Manufacturing Processes. 92:189-195
- Publication Year :
- 2023
- Publisher :
- Elsevier BV, 2023.
Details
- ISSN :
- 15266125
- Volume :
- 92
- Database :
- OpenAIRE
- Journal :
- Journal of Manufacturing Processes
- Accession number :
- edsair.doi...........456ad5e41fca23853eb911af947a0c0f