Influence of focus positions on underwater femtosecond laser dicing of silicon wafer

Subjects

Subjects :

Strategy and Management
Management Science and Operations Research
Industrial and Manufacturing Engineering

Details

ISSN :

15266125

Volume :

92

Database :

OpenAIRE

Journal :

Journal of Manufacturing Processes

Accession number :

edsair.doi...........456ad5e41fca23853eb911af947a0c0f