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Application of Atmospheric Pressure Plasma in the Ultrasmooth Polishing of SiC Optics
- Publication Year :
- 2006
- Publisher :
- Trans Tech Publications Ltd., 2006.
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........44ec13484379a5c9621b5a87b0a697da
- Full Text :
- https://doi.org/10.4028/0-87849-421-9.504