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Indentation of single-crystal silicon nanolines: Buckling and contact friction at nanoscales

Authors :
Jang-Hi Im
Richard A. Allen
Zhiquan Luo
Bin Li
Rui Huang
Huai Huang
Qiu Zhao
Min K. Kang
Paul S. Ho
Michael W. Cresswell
Source :
Journal of Applied Physics. 105:073510
Publication Year :
2009
Publisher :
AIP Publishing, 2009.

Abstract

High-quality single-crystal silicon nanolines (SiNLs) with a 24 nm linewidth and a height/width aspect ratio of 15 were fabricated. The mechanical properties of the SiNLs were characterized by nanoindentation tests with an atomic force microscope. The indentation load-displacement curves showed an instability with large displacement bursts at a critical load ranging from 9 to 30 μN. This phenomenon was attributed to a transition of the buckling mode of the SiNLs under indentation, which occurred preceding the final fracture of the nanolines. The mechanics of SiNLs under indentation was analyzed by finite element simulations, which revealed two different buckling modes depending on the contact friction at the nanoscale.

Details

ISSN :
10897550 and 00218979
Volume :
105
Database :
OpenAIRE
Journal :
Journal of Applied Physics
Accession number :
edsair.doi...........44e8cfae6ab6d0b22f007398ecb4e54f
Full Text :
https://doi.org/10.1063/1.3103251