48.1: Inline Low Temperature Polycrystalline Silicon Roughness and Grain Size Metrology Enabled by Electron Beam Review for a Better Process Control of Excimer Laser Annealing

Subjects

Subjects :

Organic Chemistry
Biochemistry

Details

ISSN :

21680159 and 0097966X

Volume :

53

Database :

OpenAIRE

Journal :

SID Symposium Digest of Technical Papers

Accession number :

edsair.doi...........44d546088b164bb82efe74a3022902d6

Full Text :

https://doi.org/10.1002/sdtp.15994