Development of an Ultra-Precision Positioner and its Applications

Authors :: Shinji Takada
K. Kosaka
Tetsuya Iwabuchi
Yoshiya Egashira
K. Nagamoto
Misawo Shibata
Hiroshi Kubota
Source :: Solid State Phenomena. :413-418
Publication Year :: 2001
Publisher :: Trans Tech Publications, Ltd., 2001.

Subjects :: Materials science
Ultrasonic motor
Mechanical engineering
General Materials Science
Condensed Matter Physics
Ultra precision
Atomic and Molecular Physics, and Optics

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