X‐ray diffraction reciprocal space mapping of a GaAs surface grating

A GaAs surface grating (period 574 nm) is analyzed by four crystal‐six reflection x‐ray diffraction. Two‐dimensional measurements in the vicinity of the 004 GaAs reciprocal lattice point show satellites in the transverse direction related to the periodicity of the grating. A cross pattern, centered on the 004 GaAs reciprocal lattice point, is formed by these satellites. An explanation is given by a model which includes the influence of transmission through the surface pattern on the substrate diffraction.