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Annealing of Damage in GaAs and InP after Implantation of Cd and In
- Source :
- Materials Science Forum. :1481-1486
- Publication Year :
- 1992
- Publisher :
- Trans Tech Publications, Ltd., 1992.
Details
- ISSN :
- 16629752
- Database :
- OpenAIRE
- Journal :
- Materials Science Forum
- Accession number :
- edsair.doi...........4371ad8e41b240afc2cd8a6bb430818e
- Full Text :
- https://doi.org/10.4028/www.scientific.net/msf.83-87.1481