Back to Search
Start Over
Fabrication of SOI Substrates with Buried Silicide Layers for BICMOS-applications
- Source :
- ECS Meeting Abstracts. :521-521
- Publication Year :
- 2006
- Publisher :
- The Electrochemical Society, 2006.
-
Abstract
- not Available.
Details
- ISSN :
- 21512043
- Database :
- OpenAIRE
- Journal :
- ECS Meeting Abstracts
- Accession number :
- edsair.doi...........434593416f7443872c5e5dfd91ae2cd9
- Full Text :
- https://doi.org/10.1149/ma2005-01/11/521