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Electrostatic MEMS Microphones
- Publication Year :
- 2012
- Publisher :
- Springer Netherlands, 2012.
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........431f0f31707759825d7888d5a29e5a45
- Full Text :
- https://doi.org/10.1007/978-90-481-9751-4_317