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Effects of High-Temperature Porogens on the Moisture Uptake and Diffusion Behavior of Novel MSQ/Porogen Hybrid Low-k Dielectrics
- Source :
- ECS Meeting Abstracts. :2188-2188
- Publication Year :
- 2009
- Publisher :
- The Electrochemical Society, 2009.
-
Abstract
- not Available.
Details
- ISSN :
- 21512043
- Database :
- OpenAIRE
- Journal :
- ECS Meeting Abstracts
- Accession number :
- edsair.doi...........42e48dba84dfe5a30fdc27284069e100
- Full Text :
- https://doi.org/10.1149/ma2009-02/26/2188