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Plasma information-based virtual metrology (PI-VM) and mass production process control

Authors :
Seolhye Park
Jaegu Seong
Yunchang Jang
Hyun-Joon Roh
Ji-Won Kwon
Jinyoung Lee
Sangwon Ryu
Jaemin Song
Ki-Baek Roh
Yeongil Noh
Yoona Park
Yongsuk Jang
Taeyoung Cho
Jae-Ho Yang
Gon-Ho Kim
Source :
Journal of the Korean Physical Society. 80:647-669
Publication Year :
2022
Publisher :
Springer Science and Business Media LLC, 2022.

Subjects

Subjects :
General Physics and Astronomy

Details

ISSN :
19768524 and 03744884
Volume :
80
Database :
OpenAIRE
Journal :
Journal of the Korean Physical Society
Accession number :
edsair.doi...........421fb76f0eebcc41cbacf7cd94d53ba3

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