Oxygen scavenging of HfZrO2-based capacitors for improving ferroelectric properties

Authors :: Bong Ho Kim
Song-hyeon Kuk
Seong Kwang Kim
Joon Pyo Kim
Dae-Myeong Geum
Seung-Hyub Baek
Sang Hyeon Kim
Source :: Nanoscale Advances. 4:4114-4121
Publication Year :: 2022
Publisher :: Royal Society of Chemistry (RSC), 2022.
Abstract: We demonstrate the successful remote oxygen scavenging of HZO-based capacitors, highlighting the significant enhancement of remanent polarization, switching voltage, endurance, and retention.

Subjects :: General Engineering
General Materials Science
Bioengineering
General Chemistry
Atomic and Molecular Physics, and Optics

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