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First Demonstration of BEOL-Compatible 3D Fin-Gate Oxide Semiconductor Fe-FETs

Authors :
Qiwen Kong
Long Liu
Zijie Zheng
Chen Sun
Annie Kumar
Rui Shao
Zuopu Zhou
Leming Jiao
Jishen Zhang
Haiwen Xu
Yue Chen
Gan Liu
Dong Zhang
Xiaolin Wang
Bich-Yen Nguyen
Xiao Gong
Source :
2022 International Electron Devices Meeting (IEDM).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 International Electron Devices Meeting (IEDM)
Accession number :
edsair.doi...........414cebfdb1e7feb592966fbad3146ab0
Full Text :
https://doi.org/10.1109/iedm45625.2022.10019480