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First Demonstration of BEOL-Compatible 3D Fin-Gate Oxide Semiconductor Fe-FETs
- Source :
- 2022 International Electron Devices Meeting (IEDM).
- Publication Year :
- 2022
- Publisher :
- IEEE, 2022.
Details
- Database :
- OpenAIRE
- Journal :
- 2022 International Electron Devices Meeting (IEDM)
- Accession number :
- edsair.doi...........414cebfdb1e7feb592966fbad3146ab0
- Full Text :
- https://doi.org/10.1109/iedm45625.2022.10019480