Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer

Authors :: 王一名 Wang Yi-ming
张超 Zhang Chao
周祥燕 Zhou Xiang-yan
谢耀 Xie Yao
匡尚奇 Kuang Shang-qi
Source :: Optics and Precision Engineering. 25:2046-2056
Publication Year :: 2017
Publisher :: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2017.

Subjects :: Physics
Extreme ultraviolet lithography
Broadband
Electronic engineering
Quantum evolutionary algorithm
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

Tools