Undeformed chip width non-uniformity modeling and surface roughness prediction in wafer self-rotational grinding process

Subjects

Subjects :

Mechanics of Materials
Mechanical Engineering
Surfaces and Interfaces
Surfaces, Coatings and Films

Details

ISSN :

0301679X

Volume :

171

Database :

OpenAIRE

Journal :

Tribology International

Accession number :

edsair.doi...........3ec1951842d2a5880ad3545fec160e7b

Full Text :

https://doi.org/10.1016/j.triboint.2022.107547