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Automatic alignment of multiplexed beams of excimer laser system based on fluorescence imaging

Authors :
易爱平 Yi Aiping
赵学庆 Zhao Xueqing
赵军 Zhao Jun
张永生 Zhang Yongsheng
邵碧波 Shao Bibo
钱航 Qian Hang
马连英 Ma Lianying
冯刚 Feng Gang
王大辉 Wang Dahui
Source :
Optics and Precision Engineering. 23:949-955
Publication Year :
2015
Publisher :
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2015.

Details

ISSN :
1004924X
Volume :
23
Database :
OpenAIRE
Journal :
Optics and Precision Engineering
Accession number :
edsair.doi...........3e09805da1bcede98ea29e1c30d1e5da