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Observation of post-deposition resistance relaxation during growth of semicontinuous metal films

Authors :
Chunxi Li
Jun-Wu Zhang
Kai Wu
Zhong-Lie Wang
D.L. Yin
Junxiong Wu
Source :
Thin Solid Films. 295:315-319
Publication Year :
1997
Publisher :
Elsevier BV, 1997.

Abstract

Semicontinuous niobium and silver films were made in an ultra-high-vacuum (UHV) chamber and in-situ d.c. resistance measurements were performed. After interrupting the deposition, we investigated the immediate ageing phenomenon (relaxation) of the sample resistance on a time scale of about 10 min. Resistance increase and decrease were observed for niobium and silver samples, respectively. The intensity of the relaxation is sensitive to substrate temperature and film thickness. We suggest that edge diffusion and coalescence of islands due to thermomigration of the metal atoms are responsible for the resistance relaxation.

Details

ISSN :
00406090
Volume :
295
Database :
OpenAIRE
Journal :
Thin Solid Films
Accession number :
edsair.doi...........3cf2db907c1244ea897c339795784d29
Full Text :
https://doi.org/10.1016/s0040-6090(96)09321-2