Quantum cascade lasers with lateral double-sided distributed feedback grating

Midinfrared single mode emission, up to 20°C, for a distributed feedback structure consisting of lateral index variation on both sides of a rib waveguide is achieved on a quantum cascade laser. Fabrication was made possible by a high density plasma process developed for high aspect ratio etching of GaAlAs∕GaAs structures. A lateral grating considerably enhances design freedom by decoupling the vertical waveguide structure from the grating strength. The grating coupling, now being mainly determined by waveguide width, can then be exploited for device applications.