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Negative-Working E-Beam Copolymers
- Source :
- SPIE Proceedings.
- Publication Year :
- 1985
- Publisher :
- SPIE, 1985.
-
Abstract
- Copolymers of allyl methacrylate and propargyl methacrylate have very high speed as electron-beam and x-ray resists. They produce polymers of a structural complexity not often encountered in addition polymerization. The structural variety available in allyl methacrylate polymers gives them unusual properties, which consequently enhance their microlithographic performance.
Details
- ISSN :
- 0277786X
- Database :
- OpenAIRE
- Journal :
- SPIE Proceedings
- Accession number :
- edsair.doi...........3c8a66c1640aa0da103634b08f44cfea