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Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing
- Source :
- IEEE Transactions on Automation Science and Engineering. 19:1530-1541
- Publication Year :
- 2022
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2022.
- Subjects :
- Control and Systems Engineering
Electrical and Electronic Engineering
Subjects
Details
- ISSN :
- 15583783 and 15455955
- Volume :
- 19
- Database :
- OpenAIRE
- Journal :
- IEEE Transactions on Automation Science and Engineering
- Accession number :
- edsair.doi...........3c5c15787b87a3f7916def28757f111b