Metal‐Organic Chemical Vapor Deposition of Aluminum Scandium Nitride

Authors :: Joachim Wiegert
Oliver Ambacher
H. P. Menner
Ruediger Quay
Christian Manz
Theodor Fuchs
Agnė Žukauskaitė
Mario Prescher
Jana Ligl
Stefano Leone
Lutz Kirste
Source :: physica status solidi (RRL) – Rapid Research Letters. 14:1900535
Publication Year :: 2019
Publisher :: Wiley, 2019.

Subjects :: Metal
Scandium nitride
Materials science
chemistry
Aluminium
visual_art
Inorganic chemistry
visual_art.visual_art_medium
chemistry.chemical_element
General Materials Science
Chemical vapor deposition
Condensed Matter Physics

Tools