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Highly reproducible and reliable metal/graphene contact by ultraviolet-ozone treatment
- Source :
- Journal of Applied Physics. 115:114304
- Publication Year :
- 2014
- Publisher :
- AIP Publishing, 2014.
-
Abstract
- Resist residue from the device fabrication process is a significant source of contamination at the metal/graphene contact interface. Ultraviolet Ozone (UVO) treatment is proven here, by X-ray photoelectron spectroscopy and Raman measurement, to be an effective way of cleaning the metal/graphene interface. Electrical measurements of devices that were fabricated by using UVO treatment of the metal/graphene contact region show that stable and reproducible low resistance metal/graphene contacts are obtained and the electrical properties of the graphene channel remain unaffected.
- Subjects :
- Materials science
Graphene
business.industry
Analytical chemistry
General Physics and Astronomy
Electrical contacts
law.invention
symbols.namesake
Resist
X-ray photoelectron spectroscopy
law
symbols
Optoelectronics
Electrical measurements
Raman spectroscopy
business
Graphene nanoribbons
Graphene oxide paper
Subjects
Details
- ISSN :
- 10897550 and 00218979
- Volume :
- 115
- Database :
- OpenAIRE
- Journal :
- Journal of Applied Physics
- Accession number :
- edsair.doi...........3b3ef92201105b9b0204a6c1f9f47567