SIMOX sculpting of 3-D nano-optical structures

MLA

Tejaswi K. Indukuri, et al. “SIMOX Sculpting of 3-D Nano-Optical Structures.” The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003, Sept. 2004. EBSCOhost, https://doi.org/10.1109/leos.2003.1252937.

APA

Tejaswi K. Indukuri, Prakash Koonath, Koichiro Kishima, & Bahram Jalali. (2004). SIMOX sculpting of 3-D nano-optical structures. The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003. https://doi.org/10.1109/leos.2003.1252937

Chicago

Tejaswi K. Indukuri, Prakash Koonath, Koichiro Kishima, and Bahram Jalali. 2004. “SIMOX Sculpting of 3-D Nano-Optical Structures.” The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003, September. doi:10.1109/leos.2003.1252937.