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Elastic recoil detection analysis of coadsorption of hydrogen and deuterium on clean Si surfaces

Authors :
Shoji Fumiya
Morioka Hajime
Oura Kenjiro
Watamori Michio
Naitoh Masamichi
Source :
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 85:344-346
Publication Year :
1994
Publisher :
Elsevier BV, 1994.

Abstract

Quantitative analysis of hydrogen and deuterium coadsorbed on clean Si(111) surfaces has been carried out by elastic recoil detection analysis using a 6 MeV F 3+ ion beam under an ultra high vacuum condition. H adsorption processes onto D-saturated Si(111) surfaces and vice versa have been studied in situ.

Details

ISSN :
0168583X
Volume :
85
Database :
OpenAIRE
Journal :
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Accession number :
edsair.doi...........3a4ca7f817ef07f287466cda2683ad93
Full Text :
https://doi.org/10.1016/0168-583x(94)95841-6