Laser Assisted Doping of Silicon Carbide Thin Films Grown by Pulsed Laser Deposition

MLA

M. S. Ramachandra Rao, et al. “Laser Assisted Doping of Silicon Carbide Thin Films Grown by Pulsed Laser Deposition.” Journal of Electronic Materials, vol. 48, Mar. 2019, pp. 3468–78. EBSCOhost, https://doi.org/10.1007/s11664-019-07097-7.

APA

M. S. Ramachandra Rao, Mitsuhiro Higashihata, Daisuke Nakamura, Hiroshi Ikenoue, Emmanuel Paneerselvam, Vinoth Kumar Lakshmi Narayanan, & Nilesh J. Vasa. (2019). Laser Assisted Doping of Silicon Carbide Thin Films Grown by Pulsed Laser Deposition. Journal of Electronic Materials, 48, 3468–3478. https://doi.org/10.1007/s11664-019-07097-7

Chicago

M. S. Ramachandra Rao, Mitsuhiro Higashihata, Daisuke Nakamura, Hiroshi Ikenoue, Emmanuel Paneerselvam, Vinoth Kumar Lakshmi Narayanan, and Nilesh J. Vasa. 2019. “Laser Assisted Doping of Silicon Carbide Thin Films Grown by Pulsed Laser Deposition.” Journal of Electronic Materials 48 (March): 3468–78. doi:10.1007/s11664-019-07097-7.