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Micro-machining of Thin-film with Short Pulse Solid-State Laser
- Source :
- The Review of Laser Engineering. 24:S13-S15
- Publication Year :
- 1996
- Publisher :
- Laser Society of Japan, 1996.
Details
- ISSN :
- 13496603 and 03870200
- Volume :
- 24
- Database :
- OpenAIRE
- Journal :
- The Review of Laser Engineering
- Accession number :
- edsair.doi...........37cffb7357f01452071879eaebad4d68
- Full Text :
- https://doi.org/10.2184/lsj.24.supplement_s13