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A study of conditions of Al2O3 coatings deposition by the anodic reactive evaporation of aluminum

Authors :
V. I. Solomonov
A. A. Ershov
Yu S. Surkov
P. V. Tretnikov
N. V. Gavrilov
A. S. Kamenetskikh
Source :
Journal of Physics: Conference Series. 1115:032073
Publication Year :
2018
Publisher :
IOP Publishing, 2018.

Details

ISSN :
17426596 and 17426588
Volume :
1115
Database :
OpenAIRE
Journal :
Journal of Physics: Conference Series
Accession number :
edsair.doi...........3753d5d55c2a110acfdd55341db5fc5c