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A study of conditions of Al2O3 coatings deposition by the anodic reactive evaporation of aluminum
- Source :
- Journal of Physics: Conference Series. 1115:032073
- Publication Year :
- 2018
- Publisher :
- IOP Publishing, 2018.
- Subjects :
- 010302 applied physics
History
Materials science
chemistry.chemical_element
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Evaporation (deposition)
Computer Science Applications
Education
Anode
chemistry
Chemical engineering
Aluminium
0103 physical sciences
0210 nano-technology
Deposition (chemistry)
Subjects
Details
- ISSN :
- 17426596 and 17426588
- Volume :
- 1115
- Database :
- OpenAIRE
- Journal :
- Journal of Physics: Conference Series
- Accession number :
- edsair.doi...........3753d5d55c2a110acfdd55341db5fc5c