Laser-produced plasma light source for EUVL

MLA

Oleh V. Khodykin, et al. “Laser-Produced Plasma Light Source for EUVL.” SPIE Proceedings, Mar. 2010. EBSCOhost, https://doi.org/10.1117/12.848408.

APA

Oleh V. Khodykin, Alex I. Ershov, David W. Myers, Richard R. Hou, Alexander N. Bykanov, Daniel J. Golich, Shailendra N. Srivastava, Silvia De Dea, Imtiaz Ahmad, Richard L. Sandstrom, Georgiy O. Vaschenko, Igor V. Fomenkov, Wayne J. Dunstan, Kevin M. O’brien, Chirag Rajyaguru, Norbert R. Bowering, William N. Partlo, & David C. Brandt. (2010). Laser-produced plasma light source for EUVL. SPIE Proceedings. https://doi.org/10.1117/12.848408

Chicago

Oleh V. Khodykin, Alex I. Ershov, David W. Myers, Richard R. Hou, Alexander N. Bykanov, Daniel J. Golich, Shailendra N. Srivastava, et al. 2010. “Laser-Produced Plasma Light Source for EUVL.” SPIE Proceedings, March. doi:10.1117/12.848408.