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G505 Manufacture of a Micro-pressure Sensor using MEMS Technology

Authors :
Yuki Maeno
Naoki Sekiya
Akira Matsumoto
Source :
The Proceedings of the Fluids engineering conference. 2009:583-584
Publication Year :
2009
Publisher :
Japan Society of Mechanical Engineers, 2009.

Subjects

Subjects :
Microelectromechanical systems
Materials science
Mechanical engineering
Pressure sensor

Details

ISSN :
24242896
Volume :
2009
Database :
OpenAIRE
Journal :
The Proceedings of the Fluids engineering conference
Accession number :
edsair.doi...........36c1c57d5214ce5c6ed92cf0dce60627
Full Text :
https://doi.org/10.1299/jsmefed.2009.583
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