Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing

Several SiGe Micro–Electro Mechanical (MEM) double clamped beam resonators with different lengths were chemically functionalized and electrically measured. The impact of each functionalization step, including oxidation, silanization, immobilization and blocking, on the resonators’ performance was studied. The resonance frequency of these resonators was measured before and after each processing step. The oxidation and blocking steps were found to have the greatest impact on the resonator’s performance. Fragility of long beam resonators is investigated.