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Dislocation reduction in HgCdTe on GaAs and Si
- Source :
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 10:1492
- Publication Year :
- 1992
- Publisher :
- American Vacuum Society, 1992.
-
Abstract
- Long‐wavelength infrared molecular‐beam epitaxial (MBE) HgCdTe films with dislocation densities as low as 2.3 × 105 cm−2 on (211) GaAs and Si substrates have been obtained by postgrowth thermal annealing and thermal cycle annealing processes (300–490 °C). Experiments show that metalorganic chemical vapor deposition (MOCVD) HgCdTe epilayers require a higher thermal annealing temperature than MBE material and the difference in dislocation reduction between MBE and MOCVD HgCdTe materials is caused by dislocation movement under high‐temperature and thermal stress conditions. The CdTe buffer layer has been observed to play a significant role for the dislocation reduction in the HgCdTe epilayer grown on GaAs or Si alternative substrates. To study the role of dislocations on MBE HgCdTe/GaAs, systematic measurements of the minority carrier lifetime of MBE HgCdTe grown on both CdZnTe and GaAs substrates were carried out. A strong correlation between minority carrier lifetime and dislocation density is observed.
Details
- ISSN :
- 0734211X
- Volume :
- 10
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Accession number :
- edsair.doi...........3568499e8c3540519450adf563331e2c
- Full Text :
- https://doi.org/10.1116/1.586277