Dislocation filters utilizing anisotropic dislocation glide motion in modulus-modulated multilayer structures

Anisotropic dislocation glide expected in a multilayer structure modulated with shear modulus was investigated in Si-Ge/Si systems with an intention to apply this concept to dislocation filters that are used to reduce misfit dislocations in hetero-epitaxial films. The applicability of this approach to metallic systems is discussed.