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Three Dimensional Structures of Negative-tone Photoresist by Binary Optics

Authors :
Yoshinori Matsumoto
Sayaka Shimizu
Kei Hanai
Source :
IEEJ Transactions on Sensors and Micromachines. 125:424-425
Publication Year :
2005
Publisher :
Institute of Electrical Engineers of Japan (IEE Japan), 2005.

Subjects

Subjects :
Tone (musical instrument)
Optics
Materials science
business.industry
Mechanical Engineering
Electrical and Electronic Engineering
Photoresist
business
Binary optics

Details

ISSN :
13475525 and 13418939
Volume :
125
Database :
OpenAIRE
Journal :
IEEJ Transactions on Sensors and Micromachines
Accession number :
edsair.doi...........33de18c0b96585c2dfbc5483f0f130e9
Full Text :
https://doi.org/10.1541/ieejsmas.125.424
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