Scanning tunneling microscopic studies of surface reconstructed structures for metal/Si(100) systems

Growth modes and surface reconstructions in the systems of Group I–V and transition metals of the Periodic Table on Si(100) have been studied by scanning tunneling microscopy (STM) as a function of coverage and substrate temperature. The adsorption sites of metal, formation of superstructures and growth mode as functions of coverage and temperature are classified briefly depending on the type of metal. The mechanisms of epitaxial growth and reconstruction are discussed based on the phase diagrams of these systems.