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Ion beam analysis
- Source :
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 266:iii
- Publication Year :
- 2008
- Publisher :
- Elsevier BV, 2008.
-
Abstract
- The Ion Beam Analysis (IBA) techniques are powerful tools to investigate the composition of a material in a non-destructive way. Ion beams impinging on a material induce several processes simultaneously which lead to emission of secondary radiation and particles as illustrated in Fig. 3.1.
- Subjects :
- Nuclear and High Energy Physics
Materials science
Ion beam analysis
Ion beam
business.industry
02 engineering and technology
021001 nanoscience & nanotechnology
Ion gun
01 natural sciences
Focused ion beam
Ion source
Ion
Secondary ion mass spectrometry
Ion beam deposition
Optics
Physics::Plasma Physics
0103 physical sciences
010306 general physics
0210 nano-technology
business
Instrumentation
Subjects
Details
- ISSN :
- 0168583X
- Volume :
- 266
- Database :
- OpenAIRE
- Journal :
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Accession number :
- edsair.doi...........32eedf1ecde9ae0c350476b0dec62c5c
- Full Text :
- https://doi.org/10.1016/j.nimb.2008.03.093