Electrostatically Driven Single Chamber Bidrectional Peristaltic Gas Micropump with Four Electrodes

An electrostatically driven valveless peristaltic micropump has been developed for pumping gases through microsystems, such as a micro-gas chromatography system. The pump was operated from 85 V up to 115 V, and a maximum flow rate of 40.3 μl/min was measured at 14 Hz and 95 V with an estimated power consumption of 0.87 mW /sccm. The peristaltic micropump has one long chamber and four electrodes that divide one chamber into four small chambers during operation.