Optimization of the Material and Structure of Component Parts for Reducing the Number of Impurity Particles in CVD Process

Subjects

Subjects :

chemistry.chemical_classification
Surface coating
Fabrication
Materials science
chemistry
Impurity
Component (thermodynamics)
Ceramics and Composites
Deposition (phase transition)
Chemical vapor deposition
Polymer
Composite material
Casting

Details

ISSN :

22340491 and 12297801

Volume :

56

Database :

OpenAIRE

Journal :

Journal of the Korean Ceramic Society

Accession number :

edsair.doi...........32396f127bcc971f53a4e042ee1f1496

Full Text :

https://doi.org/10.4191/kcers.2019.56.3.03