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Fabrication and Integration of Soc Environment Sensing Hub with Gas/Pressure/Temperature Sensors

Authors :
Tung-Lin Chien
Ya-Chu Lee
Tien Chou
Yao-Yu Lin
Han-Yi Chen
Weileun Fang
Source :
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Accession number :
edsair.doi...........3195feb0f5fdc94e45c9b239c50037c6

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